@ARTICLE{Takagaki_sst_2011, author = {Takagaki, Y. and Jenichen, B. and Jahn, U. and Ramsteiner, M. and K-J Friedland and J L\"ahnemann}, title = {Hot wall epitaxy of topological insulator films}, journal = Semicond. Sci. Technol., year = {2011}, volume = {26}, pages = {125009}, number = {12}, abstract = {Hot-wall-epitaxy growth of Bi 2 Se 3 , Bi 2 Te 3 and Sb 2 Te 3 films is carried out on Si as well as GaAs surfaces. For Bi 2 Se 3 , self-assembled dots are formed at the initial stage of the growth due to the large lattice mismatch. The dots expand in a way to fill the whole substrate surface with (0 0 0 1)-oriented domains. While no in-plane epitaxial orientation relationship is established between the films and the substrates, the influence of the substrates is reflected in the morphology of the films. Throughout the growth, micrometer-size free-standing disks are spontaneously generated and eventually cover the whole surface. The disk geometry manifests that the Bi 2 Se 3 crystal grows preferentially in the in-plane directions of the (0 0 0 1)-plane. For Bi 2 Te 3 and Sb 2 Te 3 , we experience thermal decomposition. Although nanowires can be generated under low source-flux intensities, they are solely composed of Te as a consequence. Owing to different solidification temperatures, we obtain Bi 2 Te 3 islands when the substrate temperature is raised. The surface of these islands is remarkably flat and the typical thickness is less than 10 nm.}, doi = {10.1088/0268-1242/26/12/125009} }